Zero-thermal ultra high-purity acid reclamation technology
A three-stage, ambient-temperature acid recycling system that recovers spent sulfuric acid to sub-5 ppt metal purity without the energy costs of thermal distillation. Uses NEI NANOMYTE® coatings, electrospun PVDF nanofiber filters, and phosphonic-grafted silica/titania beads for semiconductor-grade ultra high-purity acid.
Overview
This solution offers a zero-thermal method for reclaiming spent ultra high-purity (UHP) sulfuric acid used in semiconductor wet-etch and cleaning processes. Traditional acid recycling relies on energy-intensive thermal distillation, which drives up operating costs, risks thermal degradation of the acid, and generates greenhouse gas emissions. By operating entirely below 35°C, this system eliminates those penalties while delivering acid purity that meets semiconductor-grade specifications.
The value proposition centers on three benefits: dramatically lower energy consumption, sub-5 ppt trace metal purity verified by ICP-MS, and a recovery yield above 99%. The system is designed for fabs and chemical suppliers that need to recover and reuse high-value UHP acid rather than disposing of it.
Technical specifications
The platform is built as a three-stage treatment train, with every internal surface protected by NEI NANOMYTE® coatings to prevent secondary contamination.
Stage 1 — Particulate and photoresist removal: Electrospun PVDF nanofiber mats capture micro particulates larger than 20 nm and strip photoresist residues from the incoming acid stream.
Stage 2 — Bulk metal extraction: A low-voltage electrodialysis stack removes bulk metallic cations from the spent acid. The membranes and internal cell components are coated with NANOMYTE® PC-20 organosilica nanocoating, which resists attack by 98% H2SO4 and prevents organic fouling during operation.
Stage 3 — Trace cation polishing: Acid passes through a fixed-bed column packed with 100–300 µm porous macro-beads. These beads are core-shell silica/titania micro-granules grafted with acid-stable phosphonic ligands that selectively trap trace cations down to sub-5 ppt levels.
Hardware protection: All fluid channels, valves, and pumps are passivated with NANOMYTE® SR-500EC hybrid coating to eliminate secondary hardware leaching.
Operating envelope: Ambient temperature operation between 25°C and 35°C, processing 95–98% H2SO4.
Technology readiness level
The technology is currently in mid-stage development with a structured 24-month validation plan. Phase 1 (months 1–6) covers synthesis of the phosphonic-grafted core-shell nanoparticles, formulation of the 100–300 µm macro-beads, fabrication of the PVDF nanofiber mats, and application of NANOMYTE® PC-20 to the electrodialysis membranes. Phase 2 (months 7–12) integrates the nanofiber filter, electrodialysis cell, and polishing column into a benchtop prototype skid, with all wetted hardware coated in NANOMYTE® SR-500EC. Phase 3 (months 13–18) validates the skid against 95–98% spent H2SO4 at 25–35°C, confirming sub-5 ppt metal purity by ICP-MS and a recovery yield above 99%. Phase 4 (months 19–24) scales bead and mat production for pilot deployment at a semiconductor fab. The system is ready for collaborative pilot trials and co-development with fab operators and chemical suppliers.
About NEI Corporation
Founded in 1997, NEI Corporation is a manufacturer and developer of advanced and specialty materials for industrial applications. The company’s core expertise lies in designing, developing, and producing materials tailored to specific customer needs, which are sold under the registered trademark NANOMYTE®. Their primary product portfolio encompasses functional and protective surface coatings, such as anti-corrosion, self-healing, and scratch-resistant treatments, alongside cathode, anode, and solid electrolyte materials for lithium-ion and sodium-ion batteries. NEI operates out of facilities in New Jersey, utilizing state-of-the-art manufacturing, characterization, and testing equipment to support their material development.
NEI functions as a solutions provider, collaborating closely with a diverse range of partners, including small companies, multinational corporations, government labs, and universities, to integrate their materials into real-world applications. By combining their intellectual property and technical knowledge, they offer comprehensive services such as materials research and development, electrochemical testing, and cell fabrication. Their work addresses critical challenges in energy storage, thermal management, and surface performance, providing customers with custom-synthesized materials that drive innovation and improve product performance across various industrial sectors.
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