High-temperature pressure sensor using aln-compounds
Innovative pressure sensor technology utilizing AlN-compounds for high-temperature environments up to 500°C, offering enhanced performance over traditional SiC systems for industrial applications.
Overview
This cutting-edge pressure sensor technology leverages AlN-compounds to operate efficiently in high-temperature environments, reaching up to 500°C. Designed for use in industries where harsh conditions are prevalent, such as aerospace and automotive sectors, this sensor utilizes advanced thin film deposition techniques and surface micromachining to provide superior performance. The sensor's design incorporates a phononic membrane that vibrates under GHz surface acoustic waves (SAWs), enabling precise pressure sensing and passive signal transmission.
Technical specifications
Key features:
- Utilizes (Al,TM)N thin films deposited on Si, SOI, or SiC substrates
- Surface micromachining technology for membrane construction
- GHz SAWs launched by interdigital transducers for vibration excitation
- Integrated on-chip antenna for passive signal transmission
- Capable of operating in temperatures up to 500°C
- Enhanced piezoelectric properties with Sc incorporation
Technology components:
- Molecular Beam Epitaxy (MBE) and reactive co-sputtering for thin film deposition
- ANSYS and COMSOL used for sensor system design and simulation
- Clean room facilities for sensor manufacturing and testing
Technology readiness level
The technology is currently at a Technology Readiness Level (TRL) of 3. Initial designs and simulations have been completed, and experimental validation is underway. The sensors will be further tested and packaged for high-temperature environments with collaboration from partner institutes, utilizing existing equipment for development.
About Berlin University of Applied Sciences
HTW Berlin is a large public university of applied sciences in Germany, with about 16,200 students, 300 professors, and 80 degree programmes, and a distinctly practice-oriented character. Its two Berlin campuses provide modern laboratory infrastructure and proximity to a dense network of companies, public bodies, cultural institutions, and research organisations across the capital region. Corporate partners can engage through collaborative or contract research, consultancy, and practice-based student projects, while the Service-Centre Research helps companies find experts, arrange laboratory visits, and shape cooperation. Research draws on competitive funding from the BMBF and BMWK, EU programmes, state sources, foundations, and contract research. The university also advises on patents and licensing.
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