Electrochemical membrane separation system for ultrapure sulfuric acid recycling
Auburn University presents a novel electrochemical membrane separation (EMS) system designed for recycling semiconductor-grade sulfuric acid, achieving sub-ppb purity and 96-98% concentration. The system utilizes a closed-loop three-chamber design featuring Boron-Doped Diamond anodes and high-shear fluidics to ensure efficient organic destruction and metal cation separation.
Overview
Auburn University's electrochemical membrane separation (EMS) system offers a cutting-edge solution for recycling semiconductor-grade sulfuric acid. This system addresses stringent purity needs, achieving sub-parts-per-billion (ppb) levels and a 96-98% concentration suitable for immediate cleanroom deployment. The closed-loop three-chamber design efficiently manages the separation and purification of sulfuric acid by destroying organic contaminants and separating trace metallic cations.
Technical specifications
Key features:
- Boron-Doped Diamond Anodes: Provides a wide electrochemical window for efficient organic destruction without electrode degradation or heavy metal leaching.
- Per-fluorosulfonic Acid Membranes: Create a charge-selective barrier that isolates purified acid, preventing re-contamination.
- High-Shear Fluidics: Minimize boundary layers, facilitating the transport of metallic cations across membrane barriers under high proton competition.
- Electroplating in Cathode Compartment: Metals are collected on a platinum-coated graphite cathode, ensuring effective recovery.
Technology readiness level
This technology is currently at TRL 4, indicating successful bench-scale validation of the EMS system. Future validation steps include multi-chamber cell prototyping and electrode integration to refine performance parameters and ensure scalability for larger recycling loops.
About Auburn University
Auburn University is a comprehensive public land‑grant research university serving industry from its main campus in Auburn, Alabama. Companies engage through a research and technology park offering on‑site convening space and services, and via a Huntsville Research and Innovation Campus embedded in Cummings Research Park near Redstone Arsenal. A long‑standing cooperative education program and a statewide extension network link employers to student talent and field deployment across Alabama. Research is supported by competitive federal funding from agencies such as NSF, USDA, DoD, and NASA. The university’s Intellectual Property Exchange provides IP management, licensing, and commercialization support.
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